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Technical Committee No |
TC01 |
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Status |
Active |
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Category |
Chemical And Textile Sector |
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Sub Category |
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$Resources:StandardType; |
Kuwaiti Standard |
This Technical Report describes a method for determining ion-sputtering rates for depth profiling
measurements with Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) where
the specimen is ion-sputtered over a region with an area between 0,4 mm2 and 3,0 mm2. This Technical
Report is applicable only to a laterally homogeneous bulk or single-layered material where the ion-sputtering
rate is determined from the sputtered depth, as measured by a mechanical stylus profilometer, and sputtering
time.
This Technical Report provides a method to convert the ion-sputtering time scale to sputtered depth in a depth
profile by assuming a constant sputtering velocity. This method has not been designed for, or tested using, a
scanning probe microscope system. It is not applicable to the case where the sputtered area is less than
0,4 mm2 or where the sputter-induced surface roughness is significant compared with the sputtered depth to
be measured
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Decision No |
37/2010 |
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Decision By |
From Ministers Office |
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Date of Meeting |
17-10-2009 |
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Approval Date |
15-09-2010 |
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Decision Date |
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Newspaper Publication Date |
19-10-2010 |
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Newspaper Number |
37/2010 |
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